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Conferences > OFT > 2008 > OFA > OFA3
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper OFA3
  • •https://doi.org/10.1364/OFT.2008.OFA3

Performance of CMP-Processed Monolithic Aluminum Mirrors

Kevin Moeggenborg, Nevin Naguib, Carlos Barros, Stanley Lesiak, and Stan Reggie

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Abstract

CMP processing of bare aluminum alloys has been shown to yield low surface roughness. The translation of roughness into mirror performance is compared through BRDF and veiling glare measurements for various aluminum processing techniques.

© 2008 Optical Society of America

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