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Optica Publishing Group
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper OThD1
  • https://doi.org/10.1364/OFT.2008.OThD1

Broad Ion Beam Milling Techniques, Results and Prospects

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Abstract

We have developed exotic versions of ion beam milling, using a broad beam. A mask modulates spatially the ion beam, allowing the generation of high precision and low roughness axisymmetrical and cylindrical surfaces.

© 2008 Optical Society of America

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