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Optica Publishing Group
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper OThD4
  • https://doi.org/10.1364/OFT.2008.OThD4

Atmospheric Plasma Jet Machining of Optical Surfaces

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Abstract

Deterministic surface machining with high spatial resolution and nanometric depth accuracy is urgently required in the fabrication of high-end optics. Thus, plasma jet tools with sub-mm tool width and high removal rates have been developed.

© 2008 Optical Society of America

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