Abstract
Deterministic surface machining with high spatial resolution and nanometric depth accuracy is urgently required in the fabrication of high-end optics. Thus, plasma jet tools with sub-mm tool width and high removal rates have been developed.
© 2008 Optical Society of America
PDF ArticleMore Like This
Th. Arnold, J. Meister, and G. Böhm
OThD2 Optical Fabrication and Testing (OF&T) 2008
Thomas Arnold, Georg Boehm, and Hendrik Paetzelt
FTh1B.3 Freeform Optics (Freeform) 2015
Yazid Tohme
OThC6 Optical Fabrication and Testing (OF&T) 2008