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  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper OTuA4
  • https://doi.org/10.1364/OFT.2008.OTuA4

Measurement and Calibration of PSD with Phase-Shifting Interferometers

Open Access Open Access

Abstract

We discuss the instrumental aspects affecting the measurement accuracy when determining PSD with phase shifting interferometers. The use of a calibration standard will also be discussed and a recommended measurement and data handling procedure. Article not available.

© 2008 Optical Society of America


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