Characterization of Surface and Thin-Film Roughness using PSD Functions

Angela Duparré

doi:10.1364/OFT.2008.OTuA5

Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
OSA Technical Digest (CD) (Optica Publishing Group, 2008),
paper OTuA5
•https://doi.org/10.1364/OFT.2008.OTuA5

Characterization of Surface and Thin-Film Roughness using PSD Functions

Angela Duparré

Optical Fabrication and Testing 2008

Rochester, New York United States
21–24 October 2008
ISBN: 978-1-55752-861-2

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Keynote Session on Mid-Spatial Frequencies and PSD (OTuA)

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A. Duparré, "Characterization of Surface and Thin-Film Roughness using PSD Functions," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optica Publishing Group, 2008), paper OTuA5.

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Abstract

Power Spectral Density functions obtained from measurements at different spatial frequency ranges and by different techniques are combined to yield comprehensive descriptions of surface structures.

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