Calibration Limits for Interferometric Measurements

Ping Zhou; James Burge

doi:10.1364/OFT.2008.OWA3

Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
OSA Technical Digest (CD) (Optica Publishing Group, 2008),
paper OWA3
•https://doi.org/10.1364/OFT.2008.OWA3

Calibration Limits for Interferometric Measurements

Ping Zhou and James Burge

Optical Fabrication and Testing 2008

Rochester, New York United States
21–24 October 2008
ISBN: 978-1-55752-861-2

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Metrology Fundamentals (OWA)

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P. Zhou and J. Burge, "Calibration Limits for Interferometric Measurements," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optica Publishing Group, 2008), paper OWA3.

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Abstract

This paper presents how to quantify the measurement noises in optical surface testing. We also discussed how to apply a smoothing filter in map registration and subtraction.

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