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Application of the NANOMEFOS Non-contact Measurement Machine in Asphere and Freeform Optics Production

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Abstract

The NANOMEFOS machine is capable of fast, non-contact and universal measurement of aspheres and freeforms, up to ∅500 mm with a measurement uncertainty below 30 nm (2σ). It is now being applied in asphere and freeform production at TNO.

© 2010 OSA, SPIE

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