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  • International Optical Design Conference and Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2010),
  • paper OMA4
  • https://doi.org/10.1364/OFT.2010.OMA4

Step Height Measurement Using a Wavelength-Selective Multimode Laser Diode

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Abstract

A wavelength-selective interferometer based on the multimode oscillation of a laser diode is proposed and is used to conduct step height measurements. A selective spectrum allows us to generate a wide range of synthetic wavelengths. A repeatability of 6.4 nm is observed in the measurements for 200 µm of step height conducted by the proposed system.

© 2010 OSA, SPIE

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