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  • International Optical Design Conference and Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2010),
  • paper OMB4
  • https://doi.org/10.1364/OFT.2010.OMB4

Fast Optical Profiler

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Abstract

We present the optical design of a fast single shot profiler. A depth resolution of 0.6 micrometer RMS was achieved in an area of 1.2×0.9 mm with a 0.5 second data acquisition time.

© 2010 OSA, SPIE

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