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Conferences > OFT > 2010 > OWE > OWE5
  • International Optical Design Conference and Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2010),
  • paper OWE5
  • •https://doi.org/10.1364/OFT.2010.OWE5

2D Spatial Frequency Considerations in Comparing 1D Power Spectral Density Measurements

Peter Z. Takacs, Sam Barber, Eugene L. Church, Konstantine Kaznatcheev, Wayne R. McKinney, and Valeriy Y. Yashchuk

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Abstract

The frequency footprint of 1D and 2D profiling instruments needs to be carefully considered in comparing 1D surface roughness spectrum measurements made by different instruments. Contributions from orthogonal direction frequency components can not be neglected.

© 2010 OSA, SPIE

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