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Simultaneously testing surface figure and radius of curvature for spheres by a point diffraction interferometer

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Abstract

We report on the development of a point diffraction interferometer in visible light with surface figure measurement accuracy of λ/50 PV. The system enables simultaneously testing of the radius of curvature with the accuracy δR/R =5×10-4.

© 2014 Optical Society of America

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More Like This
Parallel Point Diffraction Interferometer (PDI) and Shack-Hartmann Sensor (SHS) for Simultaneous Testing of an Optical System

P. Garcia-Flores and R. Diaz-Uribe
JMB9 Optical Fabrication and Testing (OF&T) 2010

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