Evaluation of Subsurface Damage and Surface Roughness by Light Scattering Techniques

Marcus Trost; Sven Schröder; Angela Duparré

doi:10.1364/OFT.2014.OTh3B.6

Classical Optics 2014
OSA Technical Digest (online) (Optica Publishing Group, 2014),
paper OTh3B.6
•https://doi.org/10.1364/OFT.2014.OTh3B.6

Evaluation of Subsurface Damage and Surface Roughness by Light Scattering Techniques

Marcus Trost, Sven Schröder, and Angela Duparré

Optical Fabrication and Testing 2014

Kohala Coast, Hawaii United States
22–26 June 2014
ISBN: 978-1-55752-747-9

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Testing III (OTh3B)

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M. Trost, S. Schröder, and A. Duparré, "Evaluation of Subsurface Damage and Surface Roughness by Light Scattering Techniques," in Classical Optics 2014, OSA Technical Digest (online) (Optica Publishing Group, 2014), paper OTh3B.6.

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Abstract

The high sensitivity to small imperfections makes light scattering measurements a very powerful and interesting characterization technique for surface roughness and subsurface defects. This will be illustrated for ground and polished optical surfaces.

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