Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > OFT > 2014 > OTh3B > OTh3B.6

Evaluation of Subsurface Damage and Surface Roughness by Light Scattering Techniques

Marcus Trost, Sven Schröder, and Angela Duparré

Not Accessible

Your library or personal account may give you access

Abstract

The high sensitivity to small imperfections makes light scattering measurements a very powerful and interesting characterization technique for surface roughness and subsurface defects. This will be illustrated for ground and polished optical surfaces.

© 2014 Optical Society of America

PDF Article
More Like This
Roughness Measurement of Ultra Precision Surfaces using Light Scattering Techniques and Analysis

Tobias Herffurth, Sven Schröder, Marcus Trost, and Angela Duparré
OTuA5 Optical Fabrication and Testing (OFT) 2010

Light scattering-based measurement of relevant surface roughness

Sven Schröder, Marcus Trost, Luisa Coriand, and Angela Duparré
OTu1D.2 Optical Fabrication and Testing (OFT) 2012

Quality assessment of precision optical surfaces through light scattering techniques

Sven Schröder, Alexander von Finck, Tobias Herffurth, and Angela Duparré
JTu5A.10 Applied Industrial Optics: Spectroscopy, Imaging and Metrology (AIO) 2012

View More...

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters
Select Topics Cancel
Top
       
© Copyright 2022 | Optica Publishing Group. All Rights Reserved
Privacy | Terms of Use