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Figure Metrology for X-Ray Focusing Mirrors with Fresnel Holograms and Photon Sieves

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Abstract

We report on interferometric measurements of the figure error of an ultra-precise mirror with the shape of an elliptical toroid for the diffraction limited focusing of hard x-rays from an undulator x-ray source. We describe measurement configurations using Fresnel type holograms and photon sieves, and evaluate the measurement uncertainty.

© 2014 Optical Society of America

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