Abstract
Advances in the implementation of coherence scanning interferometry have dramatically extended the range of application for this well-known technique. New data acquisition and data processing methods significantly improve dynamic range, enabling measurements of steeply-sloped surfaces usually considered beyond the reach of high-NA objectives. Hybrid data acquisition incorporating sinusoidally-modulated phase shifting reduces signal-to-noise to the 0.1 nm/√Hz level, extending the technique to super-polished surfaces.
© 2014 Optical Society of America
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