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Measuring High-Slope and Super-Smooth Optics with High-Dynamic-Range Coherence Scanning Interferometry

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Abstract

Advances in the implementation of coherence scanning interferometry have dramatically extended the range of application for this well-known technique. New data acquisition and data processing methods significantly improve dynamic range, enabling measurements of steeply-sloped surfaces usually considered beyond the reach of high-NA objectives. Hybrid data acquisition incorporating sinusoidally-modulated phase shifting reduces signal-to-noise to the 0.1 nm/√Hz level, extending the technique to super-polished surfaces.

© 2014 Optical Society of America

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More Like This
4-fs pulses, single-shot, high dynamic and long temporal range self-referenced spectral interferometry measurement

Thomas Oksenhendler, Andrea Trabattoni, Sunilkumar Anumula, Giuseppe Sansone, Gabriel Tempea, Francesca Calegari, and Mauro Nisoli
09.Wed.P3.51 International Conference on Ultrafast Phenomena (UP) 2014

A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head

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OM3C.1 Optical Fabrication and Testing (OFT) 2014

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Shijie Feng, Qian Chen, Chao Zuo, and Yuzhen Zhang
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