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Conferences > OFT > 2014 > OW4B > OW4B.4

Absolute Testing of Flats Based on Translational Shears, Rotational Shears and Tilt Measurements

Axel Wiegmann, Susanne Quabis, Michael Schulz, Manuel Stavridis, and Clemens Elster

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Abstract

Two methods for absolute flatness metrology are presented. Both methods need specimen translations. One method requires at least three autocollimators for tilt measurements, one method requires only one autocollimator but an additional specimen rotation.

© 2014 Optical Society of America

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