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Conferences > OFT > 2017 > OM4B > OM4B.3

Fabrication of High-Precision Micro-Opto-Mechanical Components through Deep Proton Writing

Jürgen Van Erps, Evert Ebraert, Michael Vervaeke, and Hugo Thienpont

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Abstract

We present the latest advances to our Deep Proton Writing technology for the rapid prototyping of three dimensional refractive micro-optical components and high aspect ratio micro-mechanical structures, with applications in optical telecom and photonics-enhanced microfluidic labs-on-chips.

© 2017 Optical Society of America

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