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Ultra-precision surface polishing technologies achieved in the field of ultraviolet optics

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Abstract

The surface accuracy of optical elements used in an ultraviolet lithography system is required to be of atomic order, which can be achieved through long-time research and development. Ultraprecise surface polishing techniques developed at Nikon have sufficient possibility to contribute to the further growth and development of visible-light optics.

© 2017 Optical Society of America

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