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Conferences > OFT > 2021 > JTu3B > JTu3B.6

Ultraprecision Diamond Milling of a Freeform Micromirror Array Master for Nanoimprint Lithography

Jürgen Van Erps, Michael Vervaeke, Gebirie Y. Belay, and Hugo Thienpont

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Abstract

We present the fabrication of a micromirror array through ultraprecision diamond milling to be used as a master in a nanoimprint replication process. The master also includes alignment features to allow step-and-repeat tiling during the replication.

© 2021 The Author(s)

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