Telephoto-Based Optical Differentiation Wavefront Sensor and Alignment Tolerance for Freeform Metrology

Biswa Ranjan Swain; Christophe Dorrer; Jie Qiao; Jie Qiao

doi:10.1364/OFT.2021.OM3B.4

OSA Optical Design and Fabrication 2021 (Flat Optics, Freeform, IODC, OFT)
OSA Technical Digest (Optica Publishing Group, 2021),
paper OM3B.4
•https://doi.org/10.1364/OFT.2021.OM3B.4

Telephoto-Based Optical Differentiation Wavefront Sensor and Alignment Tolerance for Freeform Metrology

Biswa Ranjan Swain, Christophe Dorrer, and Jie Qiao

Optical Fabrication and Testing 2021

Washington, DC United States
27 June–1 July 2021
ISBN: 978-1-943580-88-0

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OF&T - System Level Considerations (OM3B)

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B. R. Swain, C. Dorrer, and J. Qiao, "Telephoto-Based Optical Differentiation Wavefront Sensor and Alignment Tolerance for Freeform Metrology," in OSA Optical Design and Fabrication 2021 (Flat Optics, Freeform, IODC, OFT), F. Capasso, W. Chen, P. Dainese, J. Fan, J. DeGroote Nelson, F. Duerr, J. Rogers, J. Rolland, P. Clark, R. Pfisterer, H. Rehn, S. Thibault, M. Jenkins, D. Wook Kim, and N. Trela-McDonald, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper OM3B.4.

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Abstract

An Optical Differentiation Wavefront Sensor using telephoto design that reduces the system length is presented. Measurement of freeform wavefront showed RMS accuracy < λ/10(λ=633 nm) and robustness to alignment uncertainty as accuracy change of λ/50.

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