High Quality Measurements of Mid Spatial Frequencies in Optical Surfaces

Piotr Szwaykowski

Optica Design and Fabrication Congress 2023 (IODC, OFT)
Technical Digest Series (Optica Publishing Group, 2023),
paper OTh2B.2

High Quality Measurements of Mid Spatial Frequencies in Optical Surfaces

Piotr Szwaykowski

Optical Fabrication and Testing 2023

Québec City, Québec Canada
4–8 June 2023
ISBN: 978-1-957171-22-7

From the session
Advanced Metrology Systems III: Interferometry (OTh2B)

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P. Szwaykowski, "High Quality Measurements of Mid Spatial Frequencies in Optical Surfaces," in Optica Design and Fabrication Congress 2023 (IODC, OFT), Technical Digest Series (Optica Publishing Group, 2023), paper OTh2B.2.

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Abstract

Modern optical polishing introduces mid-spatial frequency errors. Few standards exist to specify and measure these features. We demonstrate that with a specially designed Fizeau interferometer it is possible to correctly measure and characterize mid-spatial frequencies with sub-nanometer accuracy.

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