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Surface Smoothing Effects of Thin Film Deposition

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Abstract

Surface microroughness and associated light scatter characteristics are important issues in the development of high quality optical components. Similarly, the effects of thin films deposited on an optical component need to be considered. When the film material is metallic, light scatter is due to surface microroughness; dielectric coatings can have light scatter contributions from surface as well as bulk effects (e.g., film microstructure).

© 1984 Optical Society of America

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