Structural Characteristics of Antireflective Diamond-Like Thin Films on Germanium

N. Vedovotto; J.M. Mackowski; P. Collardelle

doi:10.1364/OIC.1988.PDP1

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1988),
paper PDP1
•https://doi.org/10.1364/OIC.1988.PDP1

Structural Characteristics of Antireflective Diamond-Like Thin Films on Germanium

N. Vedovotto, J.M. Mackowski, and P. Collardelle

Optical Interference Coatings 1988

Tucson, Arizona United States
12–15 April 1988
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N. Vedovotto, J. M. Mackowski, and P. Collardelle, "Structural Characteristics of Antireflective Diamond-Like Thin Films on Germanium," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1988), paper PDP1.

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Abstract

Antireflective diamond-like carbon thin films have been deposited on germanium infrared windows using RF glow discharge technology. The C/Ge interface has been investigated through XPS and HRTEM, in order to settle whether a reactive interface is formed during the deposition process.

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