Abstract

Optical properties of vanadium dioxide thin films show a hysteretic behavior which was well known as the results of phase transition from semiconducting to metal and corresponding transition of structure from monoclinic to tetragonal. The characteristic curves of IR transmission as a function of temperature of vanadium dioxide thin films are double valued over a finite temperature range, i,e as hysteresis loops. Shape of hysteresis loop depends upon the crystalization, the grain size, the packing density and the stress of the thin film, however all these factors of microstructure of thin film correlate with the deposition conditions. Effect of low energy argon ion bombardment on optical properties of predeposited vanadium dioxide films were investigated by F. Cardillo Case. (1)

© 1988 Optical Society of America