Abstract
A rugate deposition monitoring approach is presented. Visible and FTIR insitu monitoring provides insight into the behavior of rugates during deposition and error analysis.
© 1992 Optical Society of America
PDF ArticleA rugate deposition monitoring approach is presented. Visible and FTIR insitu monitoring provides insight into the behavior of rugates during deposition and error analysis.
© 1992 Optical Society of America
PDF Article