Abstract

Calcium floride films have been widely used as coating materials in UV regions with wavelengths > 190nm, particularly for ArF and KrF excimer laser components^1-2. However films prepared by average industrical coating technologies are found exhibiting disadvantages such as softness of film, high porosity, and poor adhesion to substrates. Based on our previous studies on the characterization of composite films of CaF2-TiO2^3-4 and also the possible chemical interactions between the adjacent layers of CaF2 & SiO2 in multilayer stack reported in literature⁵, we believe that a study on the optical and mechanical properties of the films with CaF2 and SiO2 mixed at different composition ratios is of great interest.

© 1998 Optical Society of America