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Conferences > OIC > 1998 > MA > MA.2

Ion Assisted Deposition of Optical Coatings on cold substrates - a comparison of processes using different ion sources

H. S. Niederwald, M. Mertin, U. B. Schallenberg, S. Laux, A. Duparre, N. Kaiser, M. Kennedy, and D. Ristau

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Abstract

Ion- or plasma assisted deposition processes for optical coating applications have been studied for many years. It is well established that they imply superior properties of the coatings, which lead to the application of these technologies in several specialized fields. Until recently, however, IAD has not replaced conventional physical vapor deposition processes on heated substrates in the wide field of optical coatings.

© 1998 Optical Society of America

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