Abstract

In a companion paper, a new fully automated, high rate, deposition system for the fabrication of complex optical coatings was described. In order for this system to accurately deposit complex filters, several conditions have to be met. First, it is important that the deposited films exhibit low absorption and low scatter and have bulk-like reproducible refractive indices. Second, for the accurate optical monitoring of the layer thicknesses, it is critical that the deposited films are homogeneous, have well-defined interfaces and that the refractive indices of the thin film materials are accurately known. In this paper, we will discuss various process control techniques that are necessary to ensure the deposition of high quality SiO₂ and Nb₂O₅ films so that complex filters based on these materials can be accurately fabricated.

© 1998 Optical Society of America