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Phase Detection of Roughness Correlation Within A Stack: Angle Resolved Ellipsometry of Light Scattering

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Abstract

While most scattering studies are currently based on the intensity of the scattered waves, relevant additional information can be found in the complex amplitude of these waves, characterized by a phase term. In this context first results were presented at the previous Tucson Meeting that concerned a technique based on the angle-resolved ellipsometry of light scattering [1].

© 1998 Optical Society of America

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