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Characterizing UV-optical surfaces by scattering measurements using excimer laser radiation

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Abstract

Scattering measurements represent a standard method for an assessment of the surface quality of optical components [1]. In order to measure the Total-Integrated-Scattering (TIS) of a sample, usually a He-Ne laser (633nm) in combination with an Ulbricht-sphere as integrating element is employed. However, since the intensity of scattered radiation increases with decreasing wavelength [2], the use of wavelengths in the deep ultraviolet (DUV) spectral range opens a way to increase the sensitivity of a TIS measurement.

© 1998 Optical Society of America

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