Abstract

Recently [1] we have shown that the scattering of HR coatings composed of relatively smooth oxide layers can be predicted with high accuracy from atomic force microscopy (AFM) measurements. In this case, replication of substrate roughness was found to play a decisive role for the microtopography of all interfaces. Now we present a study for a HR coating of fluoride materials, which are useful in the UV spectral region. It is known from TEM measurements that these films have a pronounced columnar microstructure [2].

© 1998 Optical Society of America