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Electrical and optical properties of indium tin oxide thin films deposited with plasma ion-assistance

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Transparent conductive materials such as tin doped indium oxide (ITO) are of special interest for several applications. Due to the wide band gap of around 4 eV, ITO is transparent in the visible spectral range even though it is a n-type semiconductor with free electrons in the conduction band resulting in high electrical conductivity and high reflectivity for infrared radiation [1].

© 1998 Optical Society of America

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