Abstract
Electron-beam deposition processes are being optimized to improve the laser damage resistance of large aperture (up to 0.34 m2) optical coatings for the National Ignition Facility (NIF). One modification over previous deposition process is the replacement of hafnia as a starting material with hafnium for source ejection reduction.1 This modification has led to a significant reduction (~10 times) in the nodular defect density. Although considerable effort has been spent on studying nodular defects, unfortunately the damage threshold of coatings can also be limited by a multitude of different defect types, i.e. damage sites are also present in nodule-free regions of large aperture optics.
© 1998 Optical Society of America
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