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Cr/Sc multilayer mirrors for the Nitrogen Kα-line in the water window

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Abstract

The high quality of magnetron-sputtered Cr/Sc multilayer mirrors is demonstrated with Cu-Kα x-ray reflection, Transmission Electron Microscopy (TEM) and synchrotron radiation reflectivity measurements close to the N-Kα-line in the water window.

© 2001 Optical Society of America

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