Black layer coatings for the photolithographic manufacture of diffraction gratings

J.A. Dobrowolski; Daniel Poitras; Tom Cassidy; Clive Midwinter

doi:10.1364/OIC.2001.ThC2

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2001),
paper ThC2
•https://doi.org/10.1364/OIC.2001.ThC2

Black layer coatings for the photolithographic manufacture of diffraction gratings

J.A. Dobrowolski, Daniel Poitras, Tom Cassidy, and Clive Midwinter

Optical Interference Coatings 2001

Banff Canada
ISBN: 1-55752-682-6

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Applications of Optical Coatings I (ThC)

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J. A. Dobrowolski, D. Poitras, T. Cassidy, and C. Midwinter, "Black layer coatings for the photolithographic manufacture of diffraction gratings," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2001), paper ThC2.

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Abstract

A black layer coating for an Al/photoresist interface is described with a reflectance less than 0.1% for 413 nm s-polarized light incident at 25º. It is made of space-compatible materials and its RMS roughness is less than 15Å.

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