Coating machine concepts for precision optics

H. Hagedorn; W. Klug; A. Kobiak; W. Lehnert; J. Pistner; M. Scherer

doi:10.1364/OIC.2004.ME1

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2004),
paper ME1
•https://doi.org/10.1364/OIC.2004.ME1

Coating machine concepts for precision optics

H. Hagedorn, W. Klug, A. Kobiak, W. Lehnert, J. Pistner, and M. Scherer

Optical Interference Coatings 2004

Tucson, Arizona United States
27 June–2 July 2004
ISBN: 3-5400-0364-9

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Deposition of Optical Coatings III (ME)

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H. Hagedorn, W. Klug, A. Kobiak, W. Lehnert, J. Pistner, and M. Scherer, "Coating machine concepts for precision optics," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2004), paper ME1.

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Abstract

The performance of a tandem plasma source solution for large box coaters is investigated for layer performance and achievable growth rates. A new fully automated sputter coating system for producing complex interference filters is presented.

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