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Conferences > OIC > 2004 > ME > ME2

Inline sputter systems versus cluster or batch tools – Sputter coaters for optical multilayers

C. Köckert, M. List, K. Gehm, J. Hartung, and J. Strümpfel

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Abstract

Optical multilayer coatings are successfully deposited by reactive magnetron sputtering. Inline systems are compared to newly designed cluster tools for both configurations horizontal and vertical setup. Excellent film properties and layer homogeneities are performed.

© 2004 Optical Society of America

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