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Structural and optical properties of titanium dioxide films produced by RAS (Radical Assisted Sputtering) coater

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Abstract

Titanium dioxide films were prepared by a previously described RAS (radical assisted sputtering) coater. Structural and optical properties of the films were investigated. Absorption-less multilayered optical filters were reached through 410nm to 700nm wavelength range.

© 2004 Optical Society of America

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