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Study of the growth and interface engineering of dense/porous SiNx optical coatings by real-time spectroscopic ellipsometry

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Abstract

We study the growth of dense and porous SiNx:H films deposited in radiofrequency and microwave plasmas. Ion bombardment is used to densify and flatten the surface of porous films, thus improving the quality of interfaces.

© 2004 Optical Society of America

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