Effects of different thermal histories on the residual stress of ZrO2 thin films

Shuying Shao; Jianda Shao; Zhengxiu Fan

doi:10.1364/OIC.2004.MF5

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2004),
paper MF5
•https://doi.org/10.1364/OIC.2004.MF5

Effects of different thermal histories on the residual stress of ZrO₂ thin films

Shuying Shao, Jianda Shao, and Zhengxiu Fan

Optical Interference Coatings 2004

Tucson, Arizona United States
27 June–2 July 2004
ISBN: 3-5400-0364-9

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Deposition of Optical Coatings IV (MF)

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S. Shao, J. Shao, and Z. Fan, "Effects of different thermal histories on the residual stress of ZrO2 thin films," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2004), paper MF5.

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Abstract

The influences of deposition temperature and post-deposition annealing on the residual stress of ZrO₂ films were studied. The variation of the residual stress may be attributed to the evolution of the microstructure.

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