Rugate filter made with composite thin film by ion beam sputtering

Cheng -Chung Lee; Chien-Jen Tang; Jin-Cherng Hsu; Jean-Yee Wu

doi:10.1364/OIC.2004.ThD10

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2004),
paper ThD10
•https://doi.org/10.1364/OIC.2004.ThD10

Rugate filter made with composite thin film by ion beam sputtering

Cheng -Chung Lee, Chien-Jen Tang, Jin-Cherng Hsu, and Jean-Yee Wu

Optical Interference Coatings 2004

Tucson, Arizona United States
27 June–2 July 2004
ISBN: 3-5400-0364-9

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C. -. Lee, C. Tang, J. Hsu, and J. Wu, "Rugate filter made with composite thin film by ion beam sputtering," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2004), paper ThD10.

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Abstract

Composite film of Ta -Si oxide with refractive indices varied from 1.48 to 2.15 has been realized by using RF ion beam sputtering. Film surface roughness was less than 0.3nm and a rugate filter was fabricated

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