Abstract
The optical monitoring curve behaves abnormally when the temperature does not reach at constant during the deposition. We utilize such an abnormal behavior to predict the thermal shift of a DWDM filter during the fabrication.
© 2004 Optical Society of America
PDF ArticleMore Like This
Chien-Cheng Kuo, Sheng-Hui Chen, Cheng-Chung Lee, Douglas Lu, and Ching-Yi Wei
ThD9 Optical Interference Coatings (OIC) 2004
Sung-Hwa Kim and Chang Kwon Hwangbo
ThB6 Optical Interference Coatings (OIC) 2004
Svetlana Dligatch and Roger P. Netterfield
TuE5 Optical Interference Coatings (OIC) 2004