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Conferences > OIC > 2004 > TuE > TuE1

Optical broadband monitoring of conventional and ion processes

D. Ristau, T. Groß, and M. Lappschies

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Abstract

This contribution is focussed on applications of spectroscopic methods for the precise control of deposition processes. Different approaches for online spectroscopy on the growing layer systems will be evaluated for conventional and ion processes.

© 2004 Optical Society of America

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