Dynamics of surface modifications during optical coating deposition in plasma-assisted processes

Aram Amassian; Patrick Desjardins; Ludvik Martinu

doi:10.1364/OIC.2004.TuE9

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2004),
paper TuE9
•https://doi.org/10.1364/OIC.2004.TuE9

Dynamics of surface modifications during optical coating deposition in plasma-assisted processes

Aram Amassian, Patrick Desjardins, and Ludvik Martinu

Optical Interference Coatings 2004

Tucson, Arizona United States
27 June–2 July 2004
ISBN: 3-5400-0364-9

From the session
Monitoring (TuE)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
A. Amassian, P. Desjardins, and L. Martinu, "Dynamics of surface modifications during optical coating deposition in plasma-assisted processes," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2004), paper TuE9.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

We analyze substrate surface modifications in the initial moments of optical coating deposition under intense ion bombardment using in situ real-time spectroscopic ellipsometry. This is followed by a study of the initial growth of TiO₂ thin films.

PDF Article

More Like This

Plasma based processes for optical surface modifications in Germany

R. Fellenberg
WA2 Optical Interference Coatings (OIC) 2004

Study of the growth and interface engineering of dense/porous SiNx optical coatings by real-time spectroscopic ellipsometry

Aram Amassian, Richard Vernhes, Jolanta Klemberg-Sapieha, Patrick Desjardins, and Ludvik Martinu
MF3 Optical Interference Coatings (OIC) 2004

Plasma ion-assisted deposition of TiO2 and MgF2 thin films

S. H. WOO, C. K. HWANGBO, Y. B. SON, I. C. MOON, and G. M. KANG
MB8 Optical Interference Coatings (OIC) 2004

Previous Article Next Article