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Accurate formulas for estimating the effect of surface micro-roughness on ellipsometric angles of dielectric thin films

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Abstract

Accurate formulas for the variations of ellipsometric angles caused by the surface micro-roughness are derived. These formulas are used for estimating sensitivities of the ellipso-metric angles to the thickness of surface overlayer presenting surface micro-roughness.

© 2004 Optical Society of America

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