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Fluoride coatings for DUV/VUV optics fabricated by Ion Beam Sputtering method

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Abstract

We have been developing optical coatings of fluoride materials fabricated by Ion Beam Sputtering method, especially for excimer laser lithography. An anti-reflection coating with a transmittance of 99.6% at wavelength of 193.4nm is achieved.

© 2004 Optical Society of America

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