Abstract

The roughness and angle resolved scattering of all-fluoride highly reflective mirrors for 193 nm deposited onto differently polished substrates were measured and analyzed. The influence of interface roughness and optical film thicknesson the scatter losses is discussed.

© 2007 Optical Society of America

PDF Article
More Like This
Roughness evolution of multilayer coatings for 6.7 nm and its impact on light scattering

Marcus Trost, Sven Schröder, Sergiy Yulin, and Angela Duparré
TA.2 Optical Interference Coatings (OIC) 2016

Fluoride antireflection coatings at 193nm by resistive heating boat

Ming-Chung Liu, Cheng-Chung Lee, Masaaki Kaneko, Kazuhide Nakahira, and Yuuichi Takano
FA7 Optical Interference Coatings (OIC) 2007

Roughness Evolution and Light Scattering Simulation in Multilayer Coatings Deposited with Plasma Ion-Assistance

Diana Tonova, Stephane Bruynooghe, and Dirk Isfort
TE.3 Optical Interference Coatings (OIC) 2019

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription