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Conferences > OIC > 2007 > MA > MA6

Stationary and In-line Reactive Magnetron Sputter Technologies for Deposition of Optical Coatings

Peter Frach, Hagen Bartzsch, Joern Weber, Joern-Steffen Liebig, and Volker Kirchhoff

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Abstract

Two new concepts for the high rate deposition of precision optical and antireflective coatings by reactive magnetron sputtering are presented. Examples of AR-coatings, HL- and rugate filters as well as film properties will be shown.

© 2007 Optical Society of America

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