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Conferences > OIC > 2007 > MB > MB3

Plasma sources for precision optical coatings

H. Hagedorn, R. Beckmann, R. Götzelmann, H. Reus, and A. Zöller

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Abstract

The performance of a new large rf-plasma source for large box coaters is investigated in respect to layer performance and achievable growth rates. The optical constants of SiO2 and TiO2 thin films are presented.

© 2007 Optical Society of America

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