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Properties, growth and filter applications of a-SiNx:H alloys prepared in pulsed radiofrequency plasma

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Abstract

SiNx:H alloys (0.47 ≤ × ≤ 1.35) are prepared by varying the duty cycle in a pulsed RF PECVD process, while keeping the gas mixture constant; a high-quality Fabry-Perot filter is fabricated.

© 2007 Optical Society of America

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