Characterization of optical coatings with a CCD angular and spatial resolved scatterometer

Myriam Zerrad; Michel Lequime; Carole Deumié; Claude Amra

doi:10.1364/OIC.2007.ThA5

Optical Interference Coatings
OSA Technical Digest (CD) (Optica Publishing Group, 2007),
paper ThA5
•https://doi.org/10.1364/OIC.2007.ThA5

Characterization of optical coatings with a CCD angular and spatial resolved scatterometer

Myriam Zerrad, Michel Lequime, Carole Deumié, and Claude Amra

Optical Interference Coatings 2007

Tucson, Arizona United States
3–8 June 2007
ISBN: 1-55752-841-1

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Measurements I (ThA)

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M. Zerrad, M. Lequime, C. Deumié, and C. Amra, "Characterization of optical coatings with a CCD angular and spatial resolved scatterometer," in Optical Interference Coatings, OSA Technical Digest (CD) (Optica Publishing Group, 2007), paper ThA5.

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Abstract

The principle of a new scattering measurement system including a mobile lighting and a fixed CCD array is described. Examples of application of this set-up to the comprehensivi characterization of optical coatings are given.

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